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Liu, Chang, Ph.D.

Foundations of MEMS / Chang Liu. - Upper Saddle River, NJ : Pearson/Prentice Hall, c2006. - xxii, 530 p. : ill. ; 25 cm.

Includes bibliographical references and index.

ISBN: 0131472860

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.3 / Cut C693

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