Laser annealing of semiconductors / edited by J.M. Poate, James W. Mayer.
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TextPublication details: New York ; London : Academic, 1982Description: xi,564p. : ill. ; 24cmISBN: 0125588208 :Subject(s): Semiconductor industry -- Laser use in -- Congresses | Semiconductors | Semiconductor devices Manufacture Use of lasersDDC classification: 621.3815/2 LOC classification: TK7871.85Other classification: RL 84
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Includes bibliographies and index.
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