TY  - BOOK
AU  - Poate,J.M.
AU  - Mayer,James W.
TI  - Laser annealing of semiconductors
SN  - 0125588208 :
AV  - TK7871.85 
U1  - 621.3815/2 19
PY  - 1982///
CY  - New York, London
PB  - Academic
KW  - Semiconductor industry
KW  - Laser use in
KW  - Congresses
KW  - Semiconductors
KW  - Semiconductor devices
KW  - Manufacture
KW  - Use of lasers
N1  - Includes bibliographies and index
ER  -