| 000 | 00613nam a22002057a 4500 | ||
|---|---|---|---|
| 003 | IQ-KoUCL | ||
| 005 | 20131212112036.0 | ||
| 008 | 131212b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0131472860 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 041 | _aEnglish | ||
| 082 | 0 | 0 |
_a621.3 _bCut C693 |
| 100 | 1 |
_aLiu, Chang, _cPh.D. |
|
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu. |
| 260 |
_aUpper Saddle River, NJ : _bPearson/Prentice Hall, _cc2006. |
||
| 300 |
_axxii, 530 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 942 |
_2ddc _cBK |
||
| 999 |
_c136174 _d136174 |
||