Foundations of MEMS / Chang Liu.

By: Liu, Chang, Ph.DMaterial type: TextTextLanguage: English Publication details: Upper Saddle River, NJ : Pearson/Prentice Hall, c2006Description: xxii, 530 p. : ill. ; 25 cmISBN: 0131472860Subject(s): Microelectromechanical systemsDDC classification: 621.3
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Books Books Koya University Central Library
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Includes bibliographical references and index.

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