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Foundations of MEMS / Chang Liu.

By: Liu, Chang, Ph.DMaterial type: Text

TextLanguage: English Publication details: Upper Saddle River, NJ : Pearson/Prentice Hall, c2006Description: xxii, 530 p. : ill. ; 25 cmISBN: 0131472860Subject(s): Microelectromechanical systemsDDC classification: 621.3

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Koya University Central Library Book Cart	620 - 629	621.3 Cut C693 (Browse shelf(Opens below))	Available		0000005737

Includes bibliographical references and index.

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